Old Web
English
Sign In
Acemap
>
Paper
>
Manufacturing method of a SOI wafer
Manufacturing method of a SOI wafer
1999
Arrigo Giuseppe D
Corrado Spinella
Salvatore Coffa
Giuseppe Arena
Marco Camalleri
Keywords:
Silicon on insulator
Wafer
Electronic engineering
Materials science
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]