Microstructure and growth mechanism of PtAl2O3 co-sputtered nanocermet films studied by SAXS, TEM and AFM

The physical properties of nanocermets are related mostly to their morphology. In this contribution, we present the microstructural and morphological evolution of co-sputtered Pt Al2O3 granular films with thickness, metal concentration and thermal annealing. These investigations are achieved by grazing angle X-ray reflectometry, transmission electron microscopy and atomic force microscopy. The experimental results show that (i) the diameter of platinum clusters increases as a function of film thickness, annealing temperature and metal concentration and (ii) a columnar growth is observed whose morphology also depends on the previous parameters and on the growth direction.