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Next Generation Dopant Gas Delivery System for Ion Implant Applications
Next Generation Dopant Gas Delivery System for Ion Implant Applications
2018
Jose I. Arno
Omar K. Farha
William Morris
Paul W. Siu
Glenn Tom
Mitchell H. Weston
Patrick E. Fuller
J. McCabe
M Ameen
Keywords:
Implant
Optoelectronics
Dopant
Ion
delivery system
Materials science
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