SrTiO3 optical waveguides fabricated by carbon ion irradiation at various fluences

Abstract We report the fabrication of planar optical waveguide in SrTiO3 crystals by 6.0 MeV carbon ion irradiation with different fluences. The dark mode spectra were measured by the prism-coupling method at 633 nm and the near-field intensity distributions were measured by the end-face coupling method. The reflectivity calculation method (RCM) was used for reconstructing refractive index profile and the finite-difference beam propagation method (FD-BPM) was used to simulate the near-field intensity distributions. SRIM was used to simulate the DPA caused by carbon ion irradiation; Micro-Raman spectra, X-ray Diffraction (XRD) and Rutherford back scattering/channeling (RBS/Channeling) were used to study the lattice damage induced by the carbon ion irradiation with different fluences in the near-surface region.