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(Ta_2O_5)_1-x(TiO_2) x Thin Film Capacitors for Integrated RF Applications
(Ta_2O_5)_1-x(TiO_2) x Thin Film Capacitors for Integrated RF Applications
1996
J. Kwo
S. Y. Hou
R. K. Watts
R. M. Fleming
E. W. Seelig
Robert Joseph Cava
Keywords:
Optoelectronics
Capacitor
Materials science
Thin film
Correction
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