Multi-spot laser processing of crystalline solar cells

We report on fast and flexible laser processing technology for crystalline solar cells by using ultra-short laser pulses and a combination of Diffractive Optical Elements (DOE´s) for beam splitting with conventional scanner technology. The focus is laid on damage reduction, decreasing processing times, and efficient processing strategies. We demonstrate the process conversion from single-spot to multi-spot ablation of thin-films and bulk material, e.g. nitride ablation and edge isolation. We will point out an increase in ablation efficiency by a factor of 3 and an additional increase in processing speed by a factor of > 50 for surface ablation processes. The DOE in combination with scanner technology provides a fast and flexible system where only an industrial proven DOE has to be implemented in front of the scanner. Due to this modification the technology can be easily adapted. Using multi-spot technology for processing of crystalline solar cells, heat accumulation has to be analyzed. Limitations in spot distance and geometrical arrangements are discussed and described mathematically. Results and process windows will be shown for a thin-film ablation (surface) and a laser edge isolation (bulk) process on crystalline solar cells. An estimation of cycle times and area throughput will show the potential for using DOE´s especially combined with ultra-short pulse lasers.