Effect of 3D distribution of a magnetic field on electron-beam formation

The paper presents a method that helps take into account all components of the magnetic field in analyzing electron paths. Optimal parameters for computer simulation are chosen using test models. The beam profile is computed in the through mode of electron-optical system analysis using actual parameters of both reverse and uniform magnetic field. The limiting value of the transverse component of magnetic field is assessed.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.