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7.23 Effects of Interface Oxide Layer on HfO, Gate Dielectrics
7.23 Effects of Interface Oxide Layer on HfO, Gate Dielectrics
2001
Yusuke Morisaki
Yoshihiro Sugita
Kiyoshi Irino
Takayulu Aoyama
Keywords:
Dielectric
Oxide
Gate oxide
Time-dependent gate oxide breakdown
Materials science
Inorganic chemistry
Optoelectronics
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