Analyzing Nanogranularity of Focused Electron-Beam-Induced Deposited (FEBID) Materials by Electron Tomography.

Nanogranular material systems are promising for a variety of applications in research and development. Their physical properties are often determined by grain sizes, shapes, mutual distances and by the chemistry of the embedding matrix With focused electron beam induced deposition arbitrarily shaped nanocomposite materials can be designed, where metallic, nanogranular structures are embedded in a carbonaceous matrix. Using "post-growth" electron beam curing, these materials can be tuned for improved electric transport or mechanical behavior. Such an optimization necessitates a thorough understanding and characterization of the internal changes in chemistry and morphology, which is where conventional projection based imaging techniques fall short. Here, we apply scanning transmission electron tomography to get a comprehensive picture of the distribution and morphology degree of embedded Pt nanograins after initial fabrication, and we demonstrate the impact of electron beam curing, which leads to condensed regions of interconnected metal nanograins.