Hybrid integrated sensor for position measurement

Abstract The design, fabrication and performance of an integrated two-dimensional position-sensitive photodetector are presented. The optoelectronic device used as the sensitive element in the circuit is a full-area position-sensitive photodiode (PPD) with high linearity over the full sensitive area. The PPD is integrated with the analogue electronics in a hybrid circuit using thick film technology. The analogue electronics include the signal amplification and the signal conditioning to form the output signals proportional to the light beam centre position at the sensor surface and an output signal proportional to the light beam intensity. Using hybrid integration, a new position-sensitive transducer is developed, giving output signals which can transmit above large distances without problems and drive directly actuators in any control system.