Superconducting Ti/TiN Thin Films for mm-Wave Absorption

Polarization-sensitive detectors at 120–500 GHz are required for the observation of the cosmic microwave background radiation. In this paper, superconducting thin films based on Ti/TiN bilayers are developed to be integrated as electromagnetic wave absorbers in suspended cooled silicon bolometers. The critical temperature (Tc) is tuned in the range of 600–800 mK through the superconductivity proximity effect between Ti and TiN to optimize the absorption of the incident power while minimizing the heat capacity of the system at low temperature. Ti/TiN bilayer samples are fabricated on silicon with two different thicknesses (100/5 and 300/5 nm). Electrical characterizations at low temperature have been performed and revealed the effect of thermal annealing (20–250 °C) on residual stress, Tc, critical magnetic field (Hc) and resistance above Tc. A physical characterization by X-ray photoelectron spectroscopy provides evidences of oxidized states which may explain these effects.