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Effect of Hydrogen Neutral Beam Treatment on Atomic layer deposition SiO 2
Effect of Hydrogen Neutral Beam Treatment on Atomic layer deposition SiO 2
2019
Hua Hsuan Chen
Bei Bei Ge
Susumu Toko
Daisuke Ohori
Takuya Ozaki
Tomohiro Kubota
Mitsuya Utsuno
Toshihisa Nozawa
Seiji Samukawa
Keywords:
Analytical chemistry
Hydrogen
Beam (structure)
Atomic layer deposition
Silicon dioxide
Materials science
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