Plenary Speech: Micro- andNano-Technologies

Inthis talk, current andfuture research directions formicro- andnano-technologies applicable tothe automotive sensormarket will bepresented. Thereexists anopportunity fornewresearch toprovide newmicro- andnano-technologies that intheshort runmaynotyetcompete with theexisting automotive sensortechnologies, butinthelong runarelikely tosurpass them.Historically, automotive sensor technology hasbeentransitioning through threephases, from1)early phases inwhichsimple driver information isgenerated, to2)computer-in-the-loop control systems to3)complete driving experience modeselection. Thisexisting technology isinphase 3,andforthis phase tobesuccessfully completed, newsensorsthathavehigher resolution, greater bandwidth andlower costmustbedeveloped. The newmicro- andnano-technologies will provide that solution. A numberofmicro- andnano-sensors, currently underdevelopment, will bedescribed andreviewed. Theseinclude 1)resonant micro strain sensorstodetermine thesmallest deflections ofeventhemost rigid ofmetalautomotive parts, 2)microsensorsthatshowpromise ofmeasuring temperature, acceleration, pressure andstrain inside theautomobile engine combustion chamber, 3)nanowire and nanotube sensorsmadeusing a new,roomtemperature fabrication methodthat allows thenanowires andnanotubes tobefabricated directly onCMOSchips and4)miniaturized, low-cost, micro RFsystems todetect thepresence ofpedestrians inthepath ofthevehicle. Thesesensors, andothers, promise to revolutionize theautomotive sensormarket.Theywill makepossible anewgeneration ofautomobiles withextremely stable chassis dynamics, extremely lowpollution andextremely safepedestrian collision avoidance systems.