Reproducible Operating Margins on a 72800-Device Digital Superconducting Chip (Open Access)

Abstract : We report the design and test of reciprocal quantum logic shift-register yield vehicles consisting of up to 72 800 Josephson junction devices per die, the largest digital superconducting circuits ever reported. Multiple physical layout styles were matched to the MIT Lincoln Laboratory foundry, which supports processes with both four and eight metal layers and minimum feature size of 0.5 m.