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Ion Species Dependence on the Interfacial Properties of Silicon Homojunctions Bonded Using an Ion Bombardment Treatment
Ion Species Dependence on the Interfacial Properties of Silicon Homojunctions Bonded Using an Ion Bombardment Treatment
2020
Michael E. Liao
Kenny Huynh
Tingyu Bai
Christoph Flötgen
Mark S. Goorsky
Keywords:
ion bombardment
Inorganic chemistry
Silicon
Ion
Materials science
Correction
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