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低k SiCOH誘電体故障分布の根本原因を決定するための方法【Powered by NICT】
低k SiCOH誘電体故障分布の根本原因を決定するための方法【Powered by NICT】
2017
P Ogden Sean
Yeap Kong Boon
Shen Tian
Justison Patrick
Lu Toh-Ming
L Plawsky Joel
Keywords:
Electronic engineering
Chemistry
Mechanical engineering
Engineering physics
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