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Deprotection kinetic monitoring of a 193nm resist by ellipsometry
Deprotection kinetic monitoring of a 193nm resist by ellipsometry
2007
H. Ridaoui
J.-H. Tortai
S. Derrough
C. Sourd
H. Trouve
A. Pikon
Keywords:
Ellipsometry
Kinetic energy
Resist
Photochemistry
Materials science
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