High repetition rate high harmonic generation with ultra-high photon flux

High harmonic generation at high repetition rate is realized with a high average power 100W, 600kHz fiber laser system. Optimization is done for two different operation regimes. At 69-75eV the source delivers a world-record photon flux of >10^11photons/s/harmonic when using argon gas jets. The use of neon gas allows for operation at significantly shorter wavelength. The important 93eV harmonic can be generated at 5·10^9 photons/s/(1% bandwidth), while even higher values of >10^10 photons/s/(1% bandwidth) are achieved between 115-140eV. The HHG source provides excellent long-term power stability of ~1% RMS for each of the operation regimes.