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Single phase high-quality semipolar (10-13) AlN epilayers on m-plane (10-10) sapphire substrates
Single phase high-quality semipolar (10-13) AlN epilayers on m-plane (10-10) sapphire substrates
2020
Xu-Qiang Shen
Kazutoshi Kojima
Hajime Okumura
Keywords:
Chemistry
Optics
Sapphire
single phase
Correction
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