Optical Property of Pyramidal-Substrate with Nano Porous Layer

2013 
Pyramidal surface is commonly used as an antireflection structure. The weighted reflectance averaged by the AM 1.5 G spectrum is about 14%. In the photovoltaic field, lowering the surface reflectivity is an important approach to improve the conversion efficiency. Black silicon surface with low reflectivity is benefit of solar cells. But conversion efficiency of black silicon solar cell is still low due to the severe surface recombination. In this paper, shallower black silicon layer was formed on the pyramidal surface. For the sample etched 1 min, the weighted reflectance is only 13.20%, and the pyramidal one is 14.10%. The layer would not deteriorate the material. Lifetime of the substrates after high temperature phosphorous diffusion is 13.35 μs higher than the pyramidal one. The mean sheet resistance is nearly the same between the pyramidal surface and the etched pyramidal surface.
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