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ALCVD hafnium silicates for low power gate stacks
ALCVD hafnium silicates for low power gate stacks
2004
J. W. Maes
O. Laitinen
H. De Witte
W. Deweerd
Annelies Delabie
Thierry Conard
Bert Brijs
Chang-gong Wang
H Velasco
G. D. Wilk
Keywords:
Hafnium
Ceramic materials
Composite material
Materials science
gate stack
Optoelectronics
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