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Crystal Structure And Optical Properties Of TiO2 Thin Films Prepared By Reactive RF Magnetron Sputtering
Crystal Structure And Optical Properties Of TiO2 Thin Films Prepared By Reactive RF Magnetron Sputtering
2015
S. Goto
Y. Adachi
Kenji Matsuda
M. Nose
Keywords:
Thin film
High-power impulse magnetron sputtering
Composite material
Sputter deposition
Materials science
Sputtering
Anatase
Crystal structure
Rutile
materials processing
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