Design, Fabrication, and Experiment of a Decoupled Multi-Frame Vibration MEMS Gyroscope

A z-axis decoupled multi-frame vibration MEMS gyroscope (DMFVMG) is presented in this paper. Firstly, the decoupled principle is employed and the sense frame, Coriolis frame and drive frame are arranged through inner fame, intermediate frame and outer frame, and the movement characteristic analysis indicates that the structure is fully decoupled. The structure is simulated through mode analysis, harmonic response and drop shock response. The simulation results show that the resonant frequencies of the Sense Mode and Drive Mode are 10094Hz and 10162Hz, and the maximum deformation and stress with the shock analysis is 7.14 $\mu {\mathrm{ m}}$ and 235.19MPa (among three different directions). Then, the structure is fabricated through MEMS processing, and P-type single-crystalline silicon wafer and 7740 glass wafer are used. After that, the structure is packaged in a ceramic vacuum tube shell and the resonant frequencies and quality values of the sense and drive mode are 10354.21Hz and 5364, 10438.23Hz and 5219, the error between fabrication and simulation is 2.58% and 2.72%. And the monitoring system of DMFVMG prototype is established by analog circuit with drive closed-loop and sense open-loop. Then, the DMFVMG prototype is tested through turntable, and the range, scale factor and intercept are ±300°/s, −19.06mV/°/s and 95.43mV respectively. Finally, five repeated bias tests are arranged and the angular random walking values and bias stability are 0.2408°/ $\surd \text{h}$ , 0.2358°/ $\surd \text{h}$ , 0.2413°/ $\surd \text{h}$ , 0.2397°/ $\surd \text{h}$ and 0.2480°/ $\surd \text{h}$ , 2.858°/h, 3.159°/h, 3.428°/h, 1.891°/h and 3.467°/h respectively.