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Study on High Quality Thermal Stress Cleavage of Thick Sapphire Wafer
Study on High Quality Thermal Stress Cleavage of Thick Sapphire Wafer
2019
Tomoya Kawabe
Tatsuaki Furumoto
Yohei Hashimoto
Tomohiro Koyano
Yuzo Ochi
Kentaro Oguchi
Yuji Chino
Akira Hosokawa
Keywords:
Wafer
Metallurgy
Materials science
Stress (mechanics)
Sapphire
Composite material
Cleavage (embryo)
co 2 laser
sapphire wafer
Correction
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