Bandgap-tunable III‐V‐OI Photonics Platform with Quantum Well Intermixing for Versatile Active-passive Integration of Chip-scale Photonic Integrated Circuits

We investigated monolithic active-passive integration on III-V-OI photonics platform using quantum well intermixing for photonic integrated circuits. We developed the void-free wafer bonding technique and established large bandgap modulation through quantum well intermixing using low-energy hot P 2 + molecular ion implantation. We monolithically integrated passive waveguides, waveguide PDs, electro-absorption (EA) modulators, optical switches with carrier-injection optical phase shifters on III-V-OI operating at 1.55 μm wavelength.