Low power consumption solid electrochemical-type micro CO2 gas sensor

Abstract Micro carbon dioxide gas sensor with low power consumption and high selectivity was fabricated based on micro-heater and electrochemical operation method. Li 3 PO 4 thick film for solid electrolyte and Li 2 CO 3 thick film for sensing material were deposited successively using screen printing technique on Si substrate in the form of slurry. In structure of micro-heater, the resistances of the two semi-circled Pt heaters are connected to the spreader for thermal uniformity. Based on the above design, a low power consumption carbon dioxide gas sensor was fabricated using a CMOS compatible MEMS process. Bridge type micro-heater based on Si substrate was fabricated by surface micromachining technique. Micro gas sensor showed a value of about 50.5 mV/decade for air based carbon dioxide gas with 59 mW power consumption.