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Fabrication of gallium oxide thin film by spin-coating method and evaluation of its physical properties
Fabrication of gallium oxide thin film by spin-coating method and evaluation of its physical properties
2021
Akihiro Momota
Miharu Kawano
Takuya Shibahara
Naoki Ohtani
Keywords:
Optoelectronics
Thin film
Spin coating
Semiconductor
Materials science
Fabrication
Gallium oxide
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