Issues of constructing scanning hybrid 3D measuring heads for high-precision contact and non-contact coordinate measurements of product dimension

The article presents a model of mechanical contact of a spherical tip and a product with small forces according to elastic deformations (further – deformations) taking into account the appearance of material deformations in the gap between them along the perimeter of the contact zone in the form of so-called piles-up. Dependences are obtained that link the gap with the deformation and the piles-up size. A graph is constructed for these parameters, the general form of which is close to the function of a single jump ~1(l-Rpile), where Rpile is the radius of the pile-up.The developed design and operating principle of the scanning hybrid fiber-optical measuring head (FOMH) based on the use of a small-sized spatial light modulator in the form of a fiber-optic piezoscanner with the formation of scanning movements of the laser beam and the measurement of gaps between the tip and the product are described. The possibilities of providing high-precision measurements of laser beam deflection angles during scanning movements by using acousto-optic heterodyne interference measurement systems are considered.