Solar-Blind Photodetector Based on Single Crystal Ga2O3 Film Prepared by a Unique Ion-Cutting Process

Ren Qinghua,Wenhui Xu,Shen Zhenghao,Tiangui You,Liu Qiang,Liu Chenhe,Zhao Lantian,Chen Lingli,Wenjie Yu

Solar-Blind Photodetector Based on Single Crystal Ga2O3 Film Prepared by a Unique Ion-Cutting Process

2021

Ren Qinghua
Wenhui Xu
Shen Zhenghao
Tiangui You
Liu Qiang
Liu Chenhe
Zhao Lantian
Chen Lingli
Wenjie Yu

A solar-blind photodetector based on single crystal β-Ga2O3 thin film transferred on a SiC substrate with an Al2O3 buffer layer was prepared by a unique ion-cutting process. The structure and micro...

Keywords:

Ion
Photodetector
Materials science
Optoelectronics
Single crystal

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