Preparation method for efficient crystal silicon passivated emitter rear contact (PERC) solar cell

2016 
The invention discloses a preparation method for an efficient crystal silicon passivated emitter rear contact (PERC) solar cell. The production method comprises the steps of providing a silicon wafer, and forming a textured surface on the front surface of the silicon wafer; forming a phosphorus diffusion layer on the front surface of the silicon wafer, and then removing PSG and peripheral phosphorus diffusion layer on the front surface of the silicon wafer; forming an SiNx antireflection layer on the front surface of the silicon wafer; forming an AlOx passivation layer on the back surface of the silicon wafer; forming an SiNx protection layer on the back surface of the silicon wafer; windowing the silicon wafer by a laser, wherein the laser windowing process is completed in two times; and implementing silk-screen printing on the silicon wafer. Correspondingly, the invention also provides the efficient crystal silicon PERC solar cell, which is prepared by using the preparation method provided by the invention. The preparation method provided by the invention is simple in technology and low in cost, and the acquired crystal silicon PERC solar cell is high in efficiency and good in appearance.
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