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Computational Modeling of Ion Energy and Angular Distributions in Pulsed Source and Bias Plasmas
Computational Modeling of Ion Energy and Angular Distributions in Pulsed Source and Bias Plasmas
2019
Rochan Upadhyay
Kenta Suzuki
Peter L. G. Ventzek
Laxminarayan L. Raja
Alok Ranjan
Keywords:
Computational physics
ion energy
Plasma
Physics
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