Fabrication of large-aperture, high efficiency, Fresnel diffractive membrane optic for space telescope

Diffractive optical system can be a favorable choice for large-aperture space telescope to reduce the mass and size of image system. To meet the demand of large-aperture, high efficiency, lightweight diffractive optic for high resolution remote sensing, a 200 mm diameter, 20 μm thick, 4-level diffractive membrane fabricated is shown to have over 62% diffraction efficiency into the +1 order, with 0.051 efficiency RMS. Over 66% diffraction efficiency is achieved for a 100 mm aperture membrane, with 0.023 efficiency RMS. The membrane thickness uniformity control is discussed and 8 nm wave front error RMS is achieved in 100 mm diameter.