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Implantation of Iron Ions into Silicon by Ablation Plasma Ion Implantation
Implantation of Iron Ions into Silicon by Ablation Plasma Ion Implantation
2001
B. Qi
Ronald M. Gilgenbach
Y. Y. Lau
Mark Jonston
Jie Lian
Luming Wang
Gary L. Doll
A. Lazarides
Keywords:
Ion implantation
Radiochemistry
Ion
Silicon
Materials science
ablation plasma
Correction
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