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Plasma Enhanced Atomic Layer Deposition of ZrO2: A Thermodynamic Approach
Plasma Enhanced Atomic Layer Deposition of ZrO2: A Thermodynamic Approach
2011
Elisabeth Blanquet
Denis Monnier
Ioana Nuta
Fabien Volpi
Béatrice Doisneau
Stéphane Coindeau
J. Roy
Blanka Detlefs
Yanyu Mi
Jörg Zegenhagen
Christine Martinet
C. Wyon
M. Gros-Jean
Keywords:
Plasma
Plasma processing
Atomic layer deposition
Analytical chemistry
Chemistry
Materials science
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