Electron transport of perovskite oxide BaSnO3 on (110) DyScO3 substrate with channel-recess for ferroelectric field effect transistors

We report an electron transport study of an La-doped perovskite oxide BaSnO3 thin film grown by molecular beam epitaxy on (110) DyScO3 as a function of electron concentration, by etching the film step-by-step with nanometer precision. Inductively coupled plasma-reactive ion etching with BCl3/Ar plasma is used for etching depth control. The local doping and electron density are experimentally determined after each etching step. The results show that the electron mobility is dominated by threading dislocations if the electron concentration is below 7.8 × 1019 cm−3, while ionized impurities and phonon scattering become more dominant at electron concentrations greater than 1.2 × 1020 cm−3. The charging state of thread dislocations is estimated to be 6.2. Furthermore, using the etch process to control the electron concentration and channel thickness, a gate-recessed ferroelectric field effect transistor is fabricated with 10 nm HfO2 as a gate dielectric. The device exhibits a saturation current of 29.9 mA/mm with a current on/off ratio of Ion/Ioff = 8.3 × 108 and a ferroelectric polarization charge density of 1.9 × 1013 cm−2. Under the forward gate bias sweep, the device operates in the enhancement mode with a threshold voltage of 3 V. Under the reverse gate sweeping bias, the device operates in the depletion mode with a threshold voltage of –1.5 V.