Compact dielectric barrier discharge excilamps

In this work, we studied the energy, time, spatial and spectral characteristics of compact KrCl-, XeCl-, XeBr- and Xe2-excilamps of various designs. The maximum radiation power density was ~30 mW cm−2 at an efficiency of 2.5%. It is shown that under optimum conditions in terms of UV efficiency, the discharges for all excilamp designs have a diffuse form.