Low-cost Electrothermally Actuated MEMS Mirrors for High-Speed 3D Laser Scanning Applications

We demonstrate reliable raster scanning of a low-cost electrothermally actuated MEMS mirror at speeds of up to 300 Hz using a simple pulse design technique, achieving a large angular range of motion ( $\boldsymbol{\pm 40^{\circ}}$ optical) while maintaining 99% linearity in an ambient environment.