Superconducting magnet program for x ray lithography source at Brookhaven National Laboratory
1991
Brookhaven National Laboratory is developing a compact electron storage ring to be used as an X-ray source for producing high-density computer chips. The circumference of this machine is 8.5 m, the machine lattice consists of four quadrupoles, two sectupoles, and a pair of air-core combined function 3.87 T superconducting dipoles. The authors describe the field characteristics and engineering realization of these magnets and present the current status of the program. >
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI