Old Web
English
Sign In
Acemap
>
Paper
>
Computer Simulated Reproduction of Film Deposition Process for Improving the Functionality of Sputtering Formed Thin Films
Computer Simulated Reproduction of Film Deposition Process for Improving the Functionality of Sputtering Formed Thin Films
2021
Mizuki Kato
Satoshi Sugimoto
Masayuki Okugawa
Yuichiro Koizumi
Keywords:
Optoelectronics
deposition process
Thin film
Sputtering
Materials science
Plasma
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]