Interface properties in dielectrics: A cross-section analysis by atomic force microscopy

Even if interfaces are more and more investigated their properties remain partially unknown, especially as regards their electronic properties. This is mainly related to the lack of characterization at relevant scale. In this context, electrical modes derivate from Atomic Force Microscopy appear well adapted. In this paper, a method to probe space charge at nanoscale is proposed. This method is based on surface potential measurement by Kelvin Probe Force Microscopy (KPFM) and post-processing technique based either on numerical derivation or Finite Element Method. Through these methods, densities of interface charges and injected charges were determined at different metal/dielectric interfaces.