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Effect of Dynamic Electric Field On Dielectric Breakdown in Damascene Cu Interconnects
Effect of Dynamic Electric Field On Dielectric Breakdown in Damascene Cu Interconnects
2013
Jun-Young Song
Han-Wool Yeon
Jang-Yong Bae
Yuchul Hwang
Young-Chang Joo
Keywords:
Speech recognition
Dielectric strength
Copper interconnect
Electric field
Electronic engineering
Materials science
Optoelectronics
Correction
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