PEROVSKITE THIN FILMS FOR HIGH-FREQUENCY CAPACITOR APPLICATIONS1

▪ Abstract Perovskite, ferroelectric and paraelectric, thin films exhibit outstanding dielectric properties, even at high frequencies (>1 GHz). This feature makes films such as (Ba,Sr)TiO3 and Pb(Zr,Ti)O3 ideally suited for a wide range of capacitor applications, particularly decoupling capacitors and tunable microwave capacitors; the latter application has been fueled by the recent explosion in wireless communications. The successful implementation of these materials as high-frequency dielectrics requires a detailed understanding of both their processing and materials properties.