Base for integrating extreme ultraviolet lithography light source collection lenses

The invention provides a base for integrating extreme ultraviolet lithography light source collection lenses, and relates to the technical field of integration of collection lenses. In order to meet the requirements of integrating multi-layer collection lenses into a collection lens system, a rim is a stainless steel circular ring; 6 spokes are arranged in the ring of the circular ring; N grooves are formed in each spoke; the grooves in the six spokes form N groups of circles which are concentric with the circular ring; N is a positive integer; one group of grooves are used for mounting one layer of collection lens; the collection lenses are fixed into the grooves by vacuum glue; and the outer diameter phi of the stainless steel circular ring is 600mm, the width is 40mm and the thickness is 40mm. The base provided by the invention is simple in structure; the collection lenses can be firmly fixed; and the base is suitable for integrating the collection lenses.