Magnetron sputtered all-metal-oxide layers with balanced charge carrier transport efficiency for long-term stable perovskite solar cells

Abstract Despite the great advance in power conversion efficiency (PCE), the poor stability of perovskite solar cells in ambient condition becomes a tremendous obstruction for real application. Solution-processed all-metal-oxide charge transport layers exhibit remarkable improvement in stability in ambient air according to the previous report. However, the solution process is confined to the limited effective area and morphology of the substrate. Here we report the magnetron sputtered charge transport layers, of which Cu doped NiOx (Cu:NiOx) acts as the hole transport layer and ZnO as the electron transport layer, respectively. We precisely control their properties on unlimited substrates without post-annealing for balanced charge transport efficiency in both interfaces, which demonstrates better power conversion efficiency. The all-metal-oxide based devices also demonstrate excellent stability in ambient condition when compared to the control devices based on conventional organic transport layers.