Correlation between Langmuir Probe and Spectroscopic Temperatures in Inductively Coupled Neon–Argon Mixture Plasma

In this study, many plasma parameters including excitation temperature $$({{T}_{{{\text{exc}}}}})$$ , electron temperature $$({{T}_{e}})$$ , skin depth $$({{\delta }_{p}})$$ , plasma potential $$({{V}_{p}})$$ , and electron energy distribution function (EEDF) are inspected in the two modes of magnetic pole enhanced-inductively coupled (MaPE-ICP) neon–argon mixture plasma by employing Langmuir probe (LP) and optical emission spectroscopy (OES) diagnostics. The major purpose of this effort is to explore the validity of spectroscopic temperatures, including excitation temperature $$(kT_{{{\text{exc}}}}^{{{\text{OES}}}})$$ and electron temperature ( $$kT_{e}^{{{\text{OES}}}}$$ ) as a substitute diagnostic tool to the measured electron temperature $$(T_{e}^{{{\text{LP}}}})$$ by Langmuir probe. The spectroscopic and LP temperatures are measured in various input powers and argon contents in the discharge. It is observed that LP and spectroscopic temperatures both display falling dependence with input power and argon content, but the spectroscopic temperature is consistently lesser than the probe temperature.This study can be very useful in reactive plasma processing, where the LP has many limitations.