Palladium thin film deposition from liquid precursors on polymers by projected excimer beams

Abstract Palladium thin films are deposited on polyimide (PI) and mylar (PET) surfaces from a solution by employing XeCl and KrF excimer lasers. The substrates are plunged in a [Pd(NH 3 ) 4 ] 2+ /HCOH system, and an illuminated diaphragm is projected onto the polymers through the precursor layer. Due to the incident laser beam, chemical reactions take place at the solution/polymer interface, yielding thin Pd films on the surface. The formation and thickness of the Pd layer depend on the numbers of pulses, laser fluence and wavelength of the laser. The formed metallic, adhesive, and homogeneous Pd deposits are found to be suitable for further electroless copper deposition. Techniques such as DEKTAK profilometry, optical microscopy, FESEM (equipped with EDX) and XRD are involved in the determination of morphological, structural and compositional characteristics of the deposited layers.