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The formation of multi-axis micromechanical gyroscopes and accelerometers using surface micromachining
The formation of multi-axis micromechanical gyroscopes and accelerometers using surface micromachining
2017
E Yu Gusev
J Y Jityaeva
Al V Bykov
Keywords:
Surface micromachining
Accelerometer
Gyroscope
Materials science
Electronic engineering
multi axis
Acoustics
Correction
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