Development of high-speed, patch-antenna intersubband photodetectors at 10.3μm

We present our work on the development of high-speed, GaAs-AlGaAs multi-quantum wells photodetectors at $10.3\mu \text{m}$, based on two-dimensional arrays of patch-antenna resonators. First, the results of FDTD simulations will be presented that allowed to optimize the patch array geometry and fabricate a first generation of detectors with microwave coplanar access. Next, we will report on our initial results from $dc$ optical characterization, namely reflectivity and photocurrent measurements.