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LinZhuang Sha
LinZhuang Sha
Chemical vapor deposition
Doping
Wafer
Thermal oxidation
Electret
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The properties of LPcvd Si/sub 3/N/sub 4//SiO/sub 2/ film electret based on silicon
1996
ISE | International Symposium on Electrets
MingZhou Zhao
Zhiqiang Huang
LinZhuang Sha
Zhen Xu
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