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Yang Xinwan
Yang Xinwan
Xi'an Jiaotong University
Surface roughness
Laser
Materials science
Surface micromachining
Pressure sensor
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Femtosecond laser micromachining in combination with ICP etching for 4H–SiC pressure sensor membranes
2020
Ceramics International
Lu-Kang Wang
You Zhao
Zixuan Yang
Yulong Zhao
Yang Xinwan
Taobo Gong
Cun Li
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